JPH0219965B2 - - Google Patents

Info

Publication number
JPH0219965B2
JPH0219965B2 JP56116215A JP11621581A JPH0219965B2 JP H0219965 B2 JPH0219965 B2 JP H0219965B2 JP 56116215 A JP56116215 A JP 56116215A JP 11621581 A JP11621581 A JP 11621581A JP H0219965 B2 JPH0219965 B2 JP H0219965B2
Authority
JP
Japan
Prior art keywords
mask
electron beam
exposure
positive
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56116215A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5825231A (ja
Inventor
Teruaki Okino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP56116215A priority Critical patent/JPS5825231A/ja
Publication of JPS5825231A publication Critical patent/JPS5825231A/ja
Publication of JPH0219965B2 publication Critical patent/JPH0219965B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Analytical Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Electron Beam Exposure (AREA)
JP56116215A 1981-07-24 1981-07-24 電子線露光によるマスク製造方法 Granted JPS5825231A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56116215A JPS5825231A (ja) 1981-07-24 1981-07-24 電子線露光によるマスク製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56116215A JPS5825231A (ja) 1981-07-24 1981-07-24 電子線露光によるマスク製造方法

Publications (2)

Publication Number Publication Date
JPS5825231A JPS5825231A (ja) 1983-02-15
JPH0219965B2 true JPH0219965B2 (en]) 1990-05-07

Family

ID=14681678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56116215A Granted JPS5825231A (ja) 1981-07-24 1981-07-24 電子線露光によるマスク製造方法

Country Status (1)

Country Link
JP (1) JPS5825231A (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5267988A (en) * 1975-12-04 1977-06-06 Matsushita Electric Ind Co Ltd Throuch-hole formation method

Also Published As

Publication number Publication date
JPS5825231A (ja) 1983-02-15

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